Imec, iyo Belgian research and innovation hub, yakaratidza yekutanga inoshanda GaAs-based heterojunction bipolar transistor (HBT) zvishandiso pa300mm Si, uye CMOS-inoenderana neGaN-based zvishandiso pa200mm Si yemamm-wave application.
Mhedzisiro yacho inoratidza kugona kwezvose III-V-on-Si uye GaN-on-Si seCMOS-inoenderana matekinoroji ekugonesa RF kumberi-kuguma modules kune anopfuura 5G application.Vakaunzwa pamusangano weIEDM wegore rapfuura (Zvita 2019, San Francisco) uye vacharatidzwa mune yakakosha mharidzo yeImec's Michael Peeters nezve kutaurirana kwevatengi kupfuura Broadband kuIEEE CCNC (10-13 Ndira 2020, Las Vegas).
Mukukurukurirana kusina waya, ne5G sechizvarwa chinotevera, kune kusundidzira kune yakakwirira yekushanda frequency, ichifamba kubva kune akabatikana sub-6GHz mabhendi akananga mm-wave mabhendi (uye kupfuura).Kuunzwa kweaya ma-mm-wave mabhendi ane chekuita kwakakura pane yakazara 5G network network uye nharembozha.Kune masevhisi enhare uye Fixed Wireless Access (FWA), izvi zvinoturikira mukuwedzera kuoma-kumagumo modules anotumira chiratidzo kune uye kubva kune antenna.
Kuti ukwanise kushanda pa-mm-wave frequency, iyo RF yekumberi-yekupedzisira modules ichafanirwa kusanganisa kumhanya kwakanyanya (kugonesa data-mazinga e10Gbps uye kupfuura) nesimba rakakura rekubuda.Pamusoro pezvo, kuita kwavo mumawoko nhare kunoisa zvikumbiro zvakakwirira pane yavo fomu chinhu uye kushanda nesimba.Kupfuura 5G, izvi zvinodikanwa hazvichagone kuwanikwa neanhasi epamberi-yekupedzisira maRF modules anowanzo vimba neakasiyana siyana tekinoroji pakati pevamwe maGaAs-based HBTs emagetsi amplifiers - anorimwa padiki uye anodhura maGaAs substrates.
"Kugonesa chizvarwa chinotevera RF kumberi-kuguma modules kupfuura 5G, Imec inoongorora CMOS-inoenderana III-V-on-Si tekinoroji", anodaro Nadine Collaert, director director kuImec."Imec iri kutarisa mukubatanidzwa kwezvikamu zvepamberi (zvakadai semagetsi amplifiers uye switch) nemamwe maseketi-akavakirwa paCMOS (senge control circuitry kana transceiver tekinoroji), kuderedza mutengo uye chimiro, uye kugonesa mitsva yehybrid circuit topologies. kugadzirisa kushanda nekubudirira.Imec iri kuongorora nzira mbiri dzakasiyana: (1) InP paSi, yakananga mm-wave uye frequency pamusoro pe100GHz (ramangwana 6G application) uye (2) GaN-based zvishandiso paSi, yakananga (muchikamu chekutanga) yakaderera mm-wave. mabhendi uye kugadzirisa maapplication ari kuda yakakwira simba density.Kunzira mbiri idzi, tawana michina yekutanga inoshanda ine hunhu hunovimbisa, uye takaona nzira dzekuwedzera mashandiro avo.
Functional GaAs/InGaP HBT zvishandiso zvakakura pa300mm Si zvakaratidzwa senhanho yekutanga yekugonesa InP-based zvishandiso.Iyo isina kuremara-isina mudziyo stack ine pazasi 3x106cm-2 threading dislocation density yakawanikwa nekushandisa Imec yakasarudzika III-V nano-ridge engineering (NRE) maitiro.Midziyo yacho inoita zvirinani pane mareferensi emidziyo, ine maGaAs akagadzirwa paSi substrates ane strain yakasununguka buffer (SRB) layer.Mune nhanho inotevera, yepamusoro-yekufamba InP-based zvishandiso (HBT uye HEMT) ichaongororwa.
Mufananidzo uri pamusoro unoratidza nzira yeNRE yekubatanidza III-V/CMOS pa300mm Si: (a) nano-trench formation;zvikanganiso zvakavharirwa munzvimbo yakamanikana yemugero;(b) HBT stack kukura uchishandisa NRE uye (c) akasiyana marongero sarudzo dzekubatanidzwa kweHBT mudziyo.
Uyezve, CMOS-inoenderana neGaN/AlGaN-yakavakirwa michina pa200mm Si yakagadzirwa ichienzanisa matatu akasiyana ezvivakwa edhizaini - HEMTs, MOSFETs uye MISHEMTs.Yakaratidzwa kuti MISHEMT michina inodarika mamwe marudzi emudziyo maererano nekugadzirisa kwekugadzirisa uye kuita ruzha rwekushanda kwepamusoro-frequency.Peak cut-off frequencies yefT/fmax yakatenderedza 50/40 yakawanikwa ye300nm gedhi kureba, iyo inoenderana neyakashumwa GaN-on-SiC zvishandiso.Kunze kwekumwe kuyera kureba kwegedhi, yekutanga mibairo neAlInN sechinhu chinovharira chinoratidza mukana wekuwedzera kuvandudza mashandiro, uye nekudaro, wedzera mashandiro echishandiso kune anodiwa mm-wave mabhendi.
Nguva yekutumira: 23-03-21